UDC 531.395, 539.198, 539.231, 519.6 Simulation of Interaction of Colliding Nanoclusters Beam with Solid Surface B. Batgerel∗, E. G. Nikonov†, I. V. Puzynin† ∗ Mongolian University of Science and Technology P.O.Box 46/520, Ulaanbaatar 210646, Mongolia † Laboratory of Information Technologies Joint Institute for Nuclear Research 6, Joliot-Curie str., Dubna, Moscow region, Russia, 141980 One of the effective methods changing surface physical and chemical properties of a material is high energy impact of nanoclusters with solid surface. <...> Molecular dynamic simulation is one of the most popular approach to study this process. <...> It is very important for material science and nanotechnology to know as much as possible about conditions for control of getting given properties of the deposited layer. <...> As contrast to our previous paper [Batgerel B., Nikonov E.G., Puzynin I.V. Simulation of Impact Intereaction of Uncharged Metallic Nanoclusters with Metallic Surface // Bulletin of Peoples’ Friendship University of Russia. <...> Physics”. — 2013. — No 4. — Pp. 42–56.] we have studied properties of deposited layer on the surface particularly a penetration depth of the cluster atoms and a thickness in angular impact conditions. <...> It is found that these parameters depend on the energy and size of nanoclusters, a number of clusters in the beam, a frequency of irradiation and a value of impact angle. <...> Key words and phrases: molecular dynamics, simulation, Verlet method, impact interaction. 1. <...> Introduction One of the effective methods changing surface physical and chemical properties of a material is high energy impact of nanoclusters with solid [1, 2]. <...> Molecular dynamic simulation is one of the most popular approach to study this process. <...> The thin-film growth by energetic cluster impact normal to the surface is studied in work [3]. <...> Simulation of the solid surface modification by high energy normal impact studied in work [4]. <...> The main goal of our investigation here is to study dynamics of penetration depth of 2. <...> The simulating system consisted of the fixed solid substrate and 3 similar impactparameters of the potential for a copper are a = 3.61(˚ A), c = 39.755, 𝜖 = 0.0124(eV), ing clusters. <...> Before simulating the impact, the substrate and clusters are separately equilibrated. <...> The work has been <...>