Engineering & Technologies 3 (2015 8) 290-296 ~ ~ ~ УДК 621.382 Development and Applications of MEMS Components Alexey A. Levitskiy* and Pavel S. Marinushkin Siberian Federal University 79 Svobodny, Krasnoyarsk, 660041, Russia Received 24.10.2014, received in revised form 27.03.2015, accepted 17.04.2015 This article provides the results of the MEMS (MicroElectroMechanical Systems) components studies. <...> The design considerations and manufacturing techniques of the silicon-based MEMS components are considered. <...> Keywords: microelectromechanical systems (MEMS), microelectromechanical resonators, SCREAM technology, microgyroscopes, inertial navigation, pedestrian navigation. <...> MEMS devices used in variety of applications: sensors and actuators, RF components and micromirrors, inkjet-printer © Siberian Federal University. <...> All rights reserved * Corresponding author E-mail address: ALevitskiy@sfu-kras.ru # 290 # Alexey A. Levitskiy and Pavel S. Marinushkin. <...> Development and Applications of MEMS Components cartridges, miniature robots, microfl uidic systems. <...> In addition, the modeling of microdevices requires consideration of effects which are not usually taken into account when analyzing the devices at the macro level: air damping and gravity force in electrostatic devices, surface tension of the liquid in the microfl uidic devices. <...> Such packages typically involve numerical methods including fi nite element method (FEM), fi nite volume method (FVM), and the boundary element method (BEM). <...> These problems can be solved by most universal fi nite element analysis packages. <...> Experience in the development of microsystem devices Microfl uidic systems. <...> Among the MEMS devices of the most interesting and challenging for the analysis are components of microfl uidic systems. <...> For the last few years there has been signifi cant growth of research in the fi eld of microfl uidic components. <...> Different microfl uidic devices such as active valves, pumps, fi lters and mixers have been designed and fabricated. <...> When considering mechanical pumps, piezoelectric valveless micropumps (fi xed valve pumps) seem to be more advantageous due to their higher reliability and higher fl ow rate. <...> Fig. 1 shows the FEM model and the experimental model of such valveless micropump [1]. <...> It consists of a liquid-fi lled <...>